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The Effect of Annealing Temperatures on Self-Ailned Replacement (Damascene) Tacn-Tan-Stacked Gate Pmosfets

Pan, J Woo, Christy

The Effect of Annealing Temperatures on Self-Ailned Replacement (Damascene) Tacn-Tan-Stacked Gate Pmosfets - 581-586 p.

Subjects--Topical Terms:
Carbon
Metal Gate
Pmosfets

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