Ultrathin Aluminum Oxide Gate Dielectric on N-Type 4h-Sic Prepared By Low Thermal Budget Nitric Acid Oxidation
Huang, S W
Ultrathin Aluminum Oxide Gate Dielectric on N-Type 4h-Sic Prepared By Low Thermal Budget Nitric Acid Oxidation - 1877-1882 p.
Silicon Devices
Ultrathin Aluminum Oxide Gate Dielectric on N-Type 4h-Sic Prepared By Low Thermal Budget Nitric Acid Oxidation - 1877-1882 p.
Silicon Devices