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Enhanced Characteristics in Gate-Recessed and Sidewall-Recessed Algaas/Ingasa Phemts By Citric-Based Selective Wet Etching

Yarn, K. F. Liao, C. I.

Enhanced Characteristics in Gate-Recessed and Sidewall-Recessed Algaas/Ingasa Phemts By Citric-Based Selective Wet Etching - 67-80 p.

Subjects--Topical Terms:
E-Phemts
D-Phemts
Gate-Recessed

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