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A Feasibility Study for Fabrication of Planar Silicon Multichip Modules Using Electron Beam lithography for Precise Location and Interconnection of Chips

Hopper, andy Jones, Alan Augur, Roderick Alan

A Feasibility Study for Fabrication of Planar Silicon Multichip Modules Using Electron Beam lithography for Precise Location and Interconnection of Chips - 97-102 p.

Subjects--Topical Terms:
Feasibility Study
lithography
Electron Beam

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