Compact and Conprehensive Database for Ion-Implanted as Profile
Suzuki, Kunihiro Sudo, R Feudel, Thomas
Compact and Conprehensive Database for Ion-Implanted as Profile - 44-49 p.
As(lil)
Ion Implantation
Monte Carlo
Compact and Conprehensive Database for Ion-Implanted as Profile - 44-49 p.
As(lil)
Ion Implantation
Monte Carlo