A SimulatIIon Study of Long Throw Sputtering for Diffusion Barrier Deposition Into Gigh Aspect Vias and Contacts
Smy, Tom Tan, liang Broughton, James N.
A SimulatIIon Study of Long Throw Sputtering for Diffusion Barrier Deposition Into Gigh Aspect Vias and Contacts - 1414-1425 p.
Integrated Circuit Metalilzation
Semiconductor Process Modeling
Simulation
A SimulatIIon Study of Long Throw Sputtering for Diffusion Barrier Deposition Into Gigh Aspect Vias and Contacts - 1414-1425 p.
Integrated Circuit Metalilzation
Semiconductor Process Modeling
Simulation