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Trapped Charge Distributions in Thin (10nm) Sio2 Films Subected to Static and Dynamic Stresses

Rodriguez, R. Nafria, M. Aymerich, X.

Trapped Charge Distributions in Thin (10nm) Sio2 Films Subected to Static and Dynamic Stresses - 881-888 p.

Subjects--Topical Terms:
Charge Carrier Processes
Dielectric Breakdown
Oxide Degradation

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