A Low Thermal Budget Self-Aligned Ti Silicide Technology Using Germanium Implantation for Thin-Film Sol Mosfet'S
liu, Ping Hsiao, Tommy C. Woo, Jason C. S.
A Low Thermal Budget Self-Aligned Ti Silicide Technology Using Germanium Implantation for Thin-Film Sol Mosfet'S - 1280-1286 p.
Cmos
Silicide
Soi
A Low Thermal Budget Self-Aligned Ti Silicide Technology Using Germanium Implantation for Thin-Film Sol Mosfet'S - 1280-1286 p.
Cmos
Silicide
Soi