Characterization of Threading Dislocations in Gan Using Iow-Temperature Aqueous Koh Etching and Atomic for ce Microscopy

Datta, Han R. Mahajan, S. Bertram, R. lindow, E.

Characterization of Threading Dislocations in Gan Using Iow-Temperature Aqueous Koh Etching and Atomic for ce Microscopy - 1171-1173 p.


Gan
Dislocation
Etching