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Proposal of Concurrent Measurement Method for Spindle Radial, Axial and Angular Motions Using Concentric Grating Interferometers

Madden, Muhummad Aketagawa, Masato

Proposal of Concurrent Measurement Method for Spindle Radial, Axial and Angular Motions Using Concentric Grating Interferometers - 242-252 p.

Subjects--Topical Terms:
Spindle
Radial Motion
Axial Motion

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