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Introduction to Microfabrication

Franssila, Sami

Introduction to Microfabrication - Chichester : John Wiley, c2004 - XVII, 401 p. : ill

Includes Bibliographical References and Index

ISBN: 0470851066

ISSN:

Subjects--Topical Terms:
Electronic Apparatus and Appliances
Microelectromechanical Systems
Microfabrication

Dewey Class. No.: 621.3 / FRA

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