Silicon Wafer Bonding Technology for VLSI and Mems Applications
Iyer, Subramanian S.
Silicon Wafer Bonding Technology for VLSI and Mems Applications - London : Inspec, c2002 - XXV, 149 p. : ill - Emis Processing Series ; No. 1 .
Includes Index
0852960395
Integrated Circuits Very Large Scale Integration
Microelectromechanical Systems
Silicon on Insulator Technology
621.38152 / IYE
Silicon Wafer Bonding Technology for VLSI and Mems Applications - London : Inspec, c2002 - XXV, 149 p. : ill - Emis Processing Series ; No. 1 .
Includes Index
0852960395
Integrated Circuits Very Large Scale Integration
Microelectromechanical Systems
Silicon on Insulator Technology
621.38152 / IYE