Microfabrication and Nanomanufacturing

Jackson, Mark J.

Microfabrication and Nanomanufacturing - Boca Raton : Crc/Taylor and Francis, c2006 - 401 p. : ill

Includes Bibliographical References and Index

0824724313




Integrated Circuits Design and Construction
Microelectromechanical Systems
Microelectronics

620.5 / JAC